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2. Study of Ru barrier failure in the Cu/Ru/Si system
Study of Rubarrier failure in the Cu/Ru/Si system M. Damayanti a) School of Materials Science and Engineering, Nanyang Technological University, Singapore 639798; and Chartered ...
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5. CMP chemistry and process for Cu interconnection with Co and Ru ...
CMP chemistry and process for Cu interconnection with Co and Ru barrier material You Wang, Max Gage, Wen-chiang Tu, Yuchun Wang, Lakshmanan Karuppiah, Kun Xu, Yufei Chen CMP Division ...
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7. Comparison of Ru/Ta and Ru/TaN as Barrier Stack for Copper ...
Comparison of Ru/Ta and Ru/TaN as Barrier Stack for Copper Metallization Xin-Ping Qu, Jing-Jing Tan, Mi Zhou, Tao Chen, Guo-Ping Ru, and Bing-Zong Li Department of microelectronics ...
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